TEST WAFER
EQUIPMENT
CASCADE SUMMIT 200 AUTOMATED PROBE SYSTEMS
Cascade Summit is a semi-automated probe system, capable of accessing the full range of your test instruments for 200mm and 150mm wafers. The powerful Velox™ probe station control software features easy on-screen navigation, wafer mapping, automation and seamless integration with analyzers and measurement software. It enables simple operation of motorized positioners and thermal systems. Addebted for fiber array system for control of optical properties.
Sample Stage:
200mm
Motion control:
Motorized motion control, resolution >0.5μm, repeatability <2μm, posibility to work with individual chips (holders)
Measurement software:
Automatic control, pattern recognition, chip to chip desplacement and mapping, optical control x10
Position table:
Adapted for fiber array systems
