TEST WAFER

FALTA TEXTO

Back to characterization tecniques

EQUIPMENT

CASCADE SUMMIT 200 AUTOMATED PROBE SYSTEMS

Cascade Summit is a semi-automated probe system, capable of accessing the full range of your test instruments for 200mm and 150mm wafers. The powerful Velox™ probe station control software features easy on-screen navigation, wafer mapping, automation and seamless integration with analyzers and measurement software. It enables simple operation of motorized positioners and thermal systems. Addebted for fiber array system for control of optical properties.

Sample Stage:

200mm

Motion control:

Motorized motion control, resolution >0.5μm, repeatability <2μm, posibility to work with individual chips (holders)

Measurement software:  

Automatic control, pattern recognition, chip to chip desplacement and mapping, optical control x10

Position table:

Adapted for fiber array systems