PROCESSING AND CHARACTERIZATION
SERVICE RATES
CHARACTERIZATION LABS
PROCESSING TECNIQUES
RATE GROUPS
GROUP 1
Internal UPV Research Centers.
GROUP 2
OPIs, PYMES & Spin-off companies.
GROUP 3
External Companies
Request a quote in: ntc-fabrication@ntc.upv.es
| 5Optical Characterization Lab | Rate | ||
| SERVICES / EQUIPMENT | Group 1 | Group 2 | Group 3 |
|
Elipsometry (UV-VIS- NIR), (Tamb) |
35 €/h | 45 €/h | 70 €/h |
|
Elipsometry (UV-VIS- NIR), (Hight T) |
40 €/h | 55 €/h | 80 €/h |
|
Fourier Transform Spectroscopy (FTIR) |
35 €/h | 45 €/h | 70 €/h |
|
FTIR Special Custom Demand |
Under request | Under request | Under request |
| Structural Characterization Lab | Rate | ||
| SERVICES / EQUIPMENT | Group 1 | Group 2 | Group 3 |
|
Optical Microscopy |
15 €/h | 25 €/h | 35 €/h |
|
SEM Sample Preparation |
35 €/h | 45 €/h | 70 €/h |
|
Characterization by SEM |
40 €/h | 60 €/h | 80 €/h |
|
Other Characterization: AFM, RAMAN or SNOM |
40 €/h | 60 €/h | 80 €/h |
| Chemical, Mechanical and Thermal Processing | RATES | |||
| SERVICES / EQUIPMENT | Group 1 | Group 2 | Group 3 | |
| Cleaning | Organic | 15 €/h | 25 €/h | 35 €/h |
|
Acid, Bases |
15 €/h | 35 €/h | 55 €/h | |
|
Polishing |
Mechanical Polishing |
35 €/h | 50 €/h | 70 €/h |
|
Dicing (15 € sample preparation) |
30 €/h | 40 €/h | 55 €/h | |
|
Dry Etching (60 € sample preparation) |
50 €/h | 80 €/h | 100 €/h | |
|
Wet Etching** (15 € sample preparation) |
35 €/h | 50 €/h | 70 €/h | |
|
Thermal Annealing (15 € sample preparation) |
35 €/h | 50 €/h | 70 €/h | |
|
RTA Annealing (30 € sample preparation) |
60 €/h | 80 €/h | ||
| Lithography | RATES | ||
| SERVICES / EQUIPMENT | Group 1 | Group 2 | Group 3 |
|
Nanoimprint |
45 €/h | 70 €/h | 90 €/h |
|
Photolithography UV |
35 €/h | 50 €/h | 70 €/h |
|
E-beam Lithography – JEOL 8100 System |
200 €/h | 275 €/h | 385 €/h |
|
E-beam Lithography – RAITH 150 System |
60 €/h | 85 €/h | 110 €/h |
|
Mask Design |
50 €/h | 80 €/h | 100 €/h |
| Thin Film Deposition | RATES | |||
| SERVICES / EQUIPMENT | Group 1 | Group 2 | Group 3 | |
|
PVD e-beam Evaporation |
1 metal (Cr, Ti, Al, Cu) |
35 €/h | 50 €/h | 70 €/h |
|
Extra cost (Au or Pt) |
Price (€/nm) |
1 | 2 | 3 |
| PECVD | 70 €/h | 90 €/h | ||
|
PVD Deposition (RF-DC sputtering) |
50 €/h | 80 €/h | 100 €/h | |
| Assembly and Packaging | RATES | |||
| SERVICES / EQUIPMENT | Group 1 | Group 2 | Group 3 | |
|
Wire bonding |
Au wire |
35 €/h | 50 €/h | 70 €/h |
|
Other services |
Under request | Under request | Under request | |